| 摘要 |
PURPOSE:To enable non-contacting meausrement of a lens, by arranging a pair of 1st and 2nd optical units with a specimen located in-between in such a way that each of the center line of 3-dimensional optic angle is provided in common with the same 3-dimensional optic angle in the both optical units and installing a means for deflecting relative distance along the common center line of the both units. CONSTITUTION:A pair of 1st and 2nd optical units 26, 27 are located with a specimen 18 in-between in such a way that the center line 28 of the 3-dimensional optic angle 2theta is possessed commonly with the same dimensional optic angle of the both units 26, 27. And, the optical axis of the specimen 18 is oriented in the due order and fastened in place and by displacing the unit 26 with respect with the surface 18A, an image-developing unit 22 is obserbed with an observation optical system 24, and slits 13A, 13B of indicating marks 12A, 12B are coincided on the unit 22. Then, a beam of light from projecting and reflecting optical systems 20A, 20B of the unit 26 intersects the surface 18A. Similarly, a beam by light is allowed to intersect the surface 18B by displacing the unit 27 with a displacing means 31. At this moment, when from an output of a counter 34B in a displacement detecting means 34, a distance between the both units 26, 27 is read out, this represents non other than the thickness of the specimen 18. |
