| 摘要 |
PURPOSE:To obtain the tomograph image of a sample easily by scanning in one dimension the electron beam passing through a sample everytime the sample is rotated by the unit angle around the rotary shaft by the angle corresponding to the rotary angle on the detecting means. CONSTITUTION:The focused electron beam EB is irradiated to the surface of the sample 11 provided rotatably around the rotary shaft 12 and perpendicular to it and the electron beam passing through the sample 11 is detected by the photograph film 19 having the spreding in two dimension. The irradiating point on the sample 11 is moved with a fine step on the right line U along the X- direction by the deflecting coils 14, 15, on the other hand the signal from the scan rotation circuit 20 is applied to the deflecting coils 17x, 17y. Furthermore, scanning for the line is achieved along the Y-direction on the photograph film 19 everytime the irradiating point is moved, to obtain a two dimension image, and the tomograph image can be obtained and the scanning is achieved for each unit rotary angle of the sample 11. Therefore, the tomograph image can be obtained in the short time and an easy manner by utilizing the electron beam. |
