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发明名称
摘要
申请公布号
JPS6128219(B2)
申请公布日期
1986.06.28
申请号
JP19780015976
申请日期
1978.02.16
申请人
VARIAN ASSOCIATES
发明人
JOSEFU HAABAADO JONSON
分类号
H01L23/12;H01L23/02;H01L23/04;H01L23/14;H01L23/36;H01L25/07
主分类号
H01L23/12
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