| 摘要 |
PURPOSE:To transfer a rectangular-coordinate type table within the range of mounting of parts by installing a pair of guide rails, stoppers, substrate holding apparatus consisting of a transfer hook, and a substrate receiving apparatus. CONSTITUTION:A fixed guide rail 24 constitutes the first positioning member in fixed type, and a movable guide 23 constitutes the second positioning member for pressing a substrate 4 onto the first positioning member. A stopper (the third positioning member) 26 is advanced and retreated towards the transfer passage for the substrate 4. A transfer hook (the fourth positioning member) 19 presses the substrate 4 onto the third positioning member 26. Therefore, a substrate holding apparatus 16 consists of the first-fourth positioning members. Further, a vertically driving apparatus 46 drives the substrate holding apparatus 16 downwardly so that the substrate holding apparatus 16 is retreated from the transfer passage for the substrate 4, and the substrate 4 is supported by a lower receiving member 25 in fixedly positioned type.
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