发明名称 METHOD OF GROWING CRYSTAL
摘要 PURPOSE:To obtain crystal having uniform characteristics in high reproducibility efficiently, by changing number of revolutions of a container having an electrically-conductive liquid for crystal growth, and controlling concentration of content of container constituting component. CONSTITUTION:The outer peripheral surface of the rotary container 2 having the electrically-conductive liquid 3 for crystal growth is provided with the electric heater 5 of the heating means 4 in a cylindrical face, a magnetic field is impressed to the liquid 3 from the magnetic field generating means 7 set at the outside of the heating means, and a DC current having a ripple current suppressed to <=4% is sent to the heater 5, to heat it. Number of revolutions of the container 2 is changed to control concentration of content of a container constituting component in crystal, and the single crystal seed 8 kept by the pulling chuck 9 is simultaneously pulled up to grow the single crystal 10.
申请公布号 JPS61141694(A) 申请公布日期 1986.06.28
申请号 JP19850247750 申请日期 1985.11.05
申请人 SONY CORP 发明人 SUZUKI TOSHIHIKO;IZAWA NOBUYUKI;OKUBO YASUNORI;HOSHI KINJI
分类号 C30B15/00;H01L21/18;H01L21/208 主分类号 C30B15/00
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