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发明名称
摘要
申请公布号	JPS61102038(U)	申请公布日期	1986.06.28
申请号	JP19840187259U	申请日期	1984.12.12
申请人		发明人
分类号	H01L21/22;F27B3/08;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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