| 摘要 |
PURPOSE:To obtain an optical recording medium having excellent stability even with a recording layer comprising Te or a lower oxide of Te (TeOx, 0<=x<1) having a high sensitivity, by a method wherein a TeO2 layer, a Te and/or TeOx (0<=x<2) layer and a TeO2 layer are laminated by using a vapor of metallic Te passing through a plasma of O2 gas or a mixed gas of inert gases. CONSTITUTION:A high-purity O2 gas and/or an inert gas is introduced into a vacuum tank 3, the interior of the tank is maintained at a vacuum of 1X10<-4>-9X10<-3>Torr, and a voltage with 50-500W is impressed on a high-frequency exciting coil 4 to excite the gas, thereby generating a plasma. Next, an electric current is passed to a heating boat 2 to heat and melt metallic Te 1. Some of the vapor particles of Te passed through the plasma are oxidized by collision with O ions or radicals, and are deposited on a substrate 7 together with unoxidized vapor particles. The composition of the Te oxide is controlled by regulating the power impressed on the coil 4, the partial pressure Po of the O2 gas, and the evaporating rate of metallic Te. |
