MANUFACTURE OF SURFACE POTENTIAL SENSOR ELEMENT

摘要

PURPOSE:To facilitate the formation of an electric conduction path pattern on a circuit board, and to easily support and mount parts by providing positions where sensor element components are supported or mounted on one surface of one circuit board concentrically. CONSTITUTION:Some of circuit element components are mounted on the top surface of the board 17 for supporting components which has a highly conductive film for shielding on the reverse surface, and the base root part 7 of a piezoelectric tuning fork equipped with piezoelectric oscillators 5 and 6 nearby base root part sides of both leg parts 1 and 2 is supported and fixed on the mount surface. Then, two-layer structures 3 and 4 formed by forming a highly conductive film on an insulating thin plate are mounted a top of both tuning fork leg parts 1 and 2 with an insulating adhesive. Then, electric connections are made and then a shield case top lid 14 having a hole 8 for leading in lines of electric force is set over the circuit board 17 so that the highly conductive film receives lines of electric force radiated from a surface to be measured and respective element bodies are stored.