| 摘要 |
PURPOSE:To effectively perform degassing for a mass spectrometer in a vacuum device by employing an electrically heated wire for a lead wire disposed in vacuum device connected with the mass spectrometer, and to thereby conduct a current therethrough. CONSTITUTION:Two electrically heated lead wires 5, 6 are connected to a semispherical positive electrode 4 being one of electrodes constituting an ion source of a quadrupole mass spectrometer type residual gas analyzer via a vacuum current introduction terminal 8. A lead wire employed thereupon is a wire of tungsten of a diameter of 0.8mm, which is heated to a red-hot state, whereby sufficient degassing by heating can be assured. |
