| 摘要 |
<p>PURPOSE:To remove interference fringes formed by reverse-surface reflected light from an optical component such as an objective and to improve precision by setting a beam splitter so that its incidence surface and projection surfaces do not cross the optical axis of irradiation light at right angles. CONSTITUTION:This device guides the irradiation light 3 to a sample-side objective 7 and a reference-mirror side objective 8 by the beam splitter 20, whose incidence surface and projection surfaces 20-1 and 20-2 are not at right angles to the optical axis of the irradiation light 3. For the purpose, the beam splitter is formed in the sectional shape of, for example, a rectangle, parallelogram, or diamond. Consequently, reverse-surface reflected light beams 5 and 6 from the projection surfaces 20-1 and 20-2 and reverse-surface reflected light from the objectives deviate greatly from regular reflected light 13 and do not strike a photodetection part, so no interference fringe is formed.</p> |
