| 摘要 |
PURPOSE:To generate uniform and high-density plasma by positioning a pair of non-grounded electrodes connected respectively to separate power sources to face each other in a vacuum vessel, generating a magnetic field along both electrodes and limiting the pseudo-cycloid motion of electrons. CONSTITUTION:Prescribed mixing ratios of treating gases are introduced from cylinders 23-24 into the vacuum vessel 11 and the inside of the vessel is evacuated by a vacuum pump 30 to the prescribed pressure. DC current is passed to coils 21, 22 to generate a magnetostatic field in the direction B parallel with the opposed surfaces 12a, 13a of the non-grounded electrodes 12, 13. Independent high-frequency electric powers are supplied in this state to the electrodes 12, 13 from the high-frequency power sources 18, 19 to induce the pseudo-cycloid motion of electrons near the respective surfaces 12a, 13a. The pseudo-cycloid motion is prohibited or limited by insulators 14, 15 and the side wall of the vessel 11 in the front of the above-mentioned motion. The plasma is increased in density and the density distribution is made uniform in the front of the prohibited or limited motion direction.
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