发明名称 |
ISOLATION VALVE |
摘要 |
A valve for isolating the interior of a glow discharge chamber from the atmosphere and other reactants. The valve includes a body mounted in an aperture of the chamber. A slit-like opening is provided therein to allow the interior of the chamber to communicate with interrelated elements of a deposition system. A source is provided for introducing inert gas into the opening under pressure somewhat greater than that of reaction gases and plasma within the chamber to create an effective, non-reactive gas curtain. |
申请公布号 |
PH19752(A) |
申请公布日期 |
1986.06.26 |
申请号 |
PH19340000269 |
申请日期 |
1982.03.02 |
申请人 |
ENERGY CONVERSION DEVICES INC. |
发明人 |
MASATSUGU IZU;DAVID GATTUSO |
分类号 |
H01L21/302;C23C14/56;C23C16/54;F16J15/16;H01L21/205;H01L21/3065;H01L21/31;H01L31/04 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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