METHOD FOR FORMING GAS-PERMEABLE COMPOUND FILM

摘要

PURPOSE:To form a gas permeable compound film having superior selectivity and permeability conveniently by using a substituted polyacetylenic polymer as raw material and forming a superthin film on an org. porous base plate by a means utilizing a vacuum system. CONSTITUTION:A porous supporting film such as polypropylene film is placed in a bell-jar type vacuum vessel, and polymer of a substituted polyacetylenic compd. which is considered to have a structural strain such as poly(trimethyl silyl)propyne, etc. is charged to a tungsten basket, which is heated with a heater under ca.10<-5>Torr reduced pressure to form a thin film on the porous supporting film. An aimed gas permeable compound film is thus formed.