| 摘要 |
<p>A mass airflow sensor with backflow detection includes a first, second, and third elongated, relatively thin silicon members generally parallel to each other and spaced from each other in an orienting plane. The second silicon member, between the first and third silicon members, has a metal coating for carrying a heating current. The first and third silicon members each have a thermocouple formed thereon so as to detect temperature differences on either side of the second silicon member and thus the direction of airflow across the metal second silicon member.</p> |
