| 摘要 |
PURPOSE:To execute the laser beam machining of high quality by detecting the thermal deforming of the lens for condensing and by automatically correcting so that the focusing position of the laser beam for machining comes always on the material to be machined based thereon. CONSTITUTION:The laser beam 18 for measuring is made incident on the condense lens 7 after the reflection by mirror 20 and made incident on a photoelectric converting element 22 passing through the pin hole plate 21 located at the focusing position. The element 22 generates the voltage in proportion to the intensity of an incident light. This voltage is transmitted to a servo device 24, which adjusts via the pin hole plate 21, photoelectric converting element 22 and driving device 23 so that said plate 21 comes always to the focusing position of said beam 18. By controlling a work head work table control device 16 and work head driving device 9 according to the change of the focusing position of this beam 18 a work head 6 is moved so that the focusing position of the laser beam 2 for machining comes always on the material 10 to be worked. |
