| 摘要 |
PURPOSE:To improve responsiveness of the flow rate detection by constituting a channel of a fluid to be detected at the central side of the channel and the outside peripheral side of the channel with reference to the peripheral abutting surface of a sphere. CONSTITUTION:The fluid to be detected is circled by turning flow by flowing along a fixed vane 11. Further, as this result, the sphere 13 having the magnetism put in the circled flow is circled. At the time of this circling, the sphere 13 is abutted on a sphere supporter 14 composed of a flat plate and the inside of the channel of a casing 12, and circled. Then, a magneto-resistance element 20 put on the outside of the channel is provided with a magnetic field of the constant strength by a permanent magnet 19 and the resistance variation of the magneto-resistance element 20 generated when the sphere 13 having the magnetism passes through the inside of this magnetic field is taken out and outputted as a pulse signal via a control circuit to measure the flow rate. |
