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发明名称
HIGH VACUUM DEPOSITION PROCESSES EMPLOYING A CONTINUOUS PNICTIDE DELIVERY SYSTEM
摘要
申请公布号
EP0152668(A3)
申请公布日期
1986.06.25
申请号
EP19840304411
申请日期
1984.06.28
申请人
STAUFFER CHEMICAL COMPANY
发明人
BAUMANN, JOHN ANDREW;GERSTEN, SUSAN WENDY;KUCK, MARK ALLEN;RACCAH, PAUL MORDECAI
分类号
H01L21/31;C23C16/448;C23C16/452;H01L21/203;(IPC1-7):C23C16/44
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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