发明名称 ALIGNER
摘要 PURPOSE:To obtain a three-dimensional positioning device which is driven with a low voltage by controlling the magnitude of the electric fields to be applied respectively to plural pieces of laminated piezo-electric elements of an integral calcination type having reverse piezoelectric effect as well as the on and off of the electric fields thereby controlling the displacement and expansion or contraction period of the elements. CONSTITUTION:The aligner is provided with the circular cylindrical laminated piezo-electric elements 11a, 11b, 11c in a housing 14 consisting of a cylinder 12 and a bottom plate 13. The bottom plate 13 is fixed to the end face of the cylinder 12 by means of an adhesive agent 15. The elements 11a, 11b, 11c are disposed at 120 deg. intervals with respect to the central axis O of the cylinder 12. The elements 11a, 11b, 11c are embedded with many disk-shaped internal electrode layers 21 into circular cylindrical ceramics 22. Part of the peripheral insulating parts of the electrode layers 21 exposed from the ceramics 22 are coated with insulators 23, 24. The electrode layers 21 are connected electrically in parallel to each other and the elements are subjected to a polarization treatment in the thickness direction. The magnitude of the electric fields to be applied to the elements 11a-11c and the on and off of said electric fields are controlled by lead wires 16a-16c, by which an object to be controlled is three- dimensionally positioned.
申请公布号 JPS61137113(A) 申请公布日期 1986.06.24
申请号 JP19840258718 申请日期 1984.12.07
申请人 NEC CORP 发明人 YAMADA KUNIO;TAKAHASHI SADAYUKI
分类号 H01L21/30;G02B7/00;H01L21/027 主分类号 H01L21/30
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