| 摘要 |
PURPOSE:To easily correct the variation in a detection characteristic due to the secular change of a nozzle, by successively arranging a plurality of correction plates, of which the distances from the nozzle by the injection of a fluid. CONSTITUTION:The distance measured value V1 between a lower correction plate 12 and a nozzle 10 is calculated by the injection of a fluid while the distance measured value V2 between an upper correction plate 14 and the nozzle 10 is calculated by the injection of the fluid. These calculated distance measured value V1, V2 are used as correction values and the distance measured value V3 of actually measured data between an object A to be inspected and the nozzle 10 is calculated as a correction valve L3 according to formula.
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