Three-dimensional imaging device

摘要

An imaging sensing system (10) has a laser light source (12). Steering mirrors (16), (18) and (22) are used with scanning mirror (20) to produce scanning of beam (24) in a line (26) across a workpiece (28). Beam (36) is reflected from the workpiece (28) and directed to a linear photodiode array (38) by the scanning mirror (20). The scanning mirror (20) is connected to a galvanometer (40) to move the beams (24) and (36), both for scanning the workpiece (28) and for supplying the scanned image in sequential fashion to individual linear diodes (42) in the array (38).