| 摘要 |
PURPOSE:To improve contact of a contact spring probe by air pressure, by installing a detachable cover to a base plate, clearance between the top plate being hermetically packed, and the top cover being available for vertical movements inside it. CONSTITUTION:A contant spring probe 102 for connecting electrically to an electric circuit of a specimen circuit substrate 400 is mounted on the base plate 100. Further, the top plate 200 perforated with a small hole 22 in the position corresponding to the probe 102 is supported by a guide 101 in such a way that runs parallel to the plate 100 and is available for vertical movements in the axial direction of the probe 102. And, a box-shape cover 300 with the open bottom is mounted in hermetically sealed condition on the plate 200 and air is introduced under pressure through an air passage nole 301 of the cover 300 and the probe 101 is connected to the electric circuit of the substrate 400. |
