| 摘要 |
PURPOSE:To produce the titled composite fine powder having the uniform particle size and excellent in high-temp. characteristics by heat-treating the fine powder which is obtained by subjecting a siloxane compd. to gas phase reaction in the nonoxidizing atmosphere. CONSTITUTION:After gasifying a siloxane compd. of a formula (R is H, alkyl, allyl and phenyl and (n) is 0-2), it is mixed with ammonia and a nonoxidizing gas and the mixture is subjected to gas phase reaction for 0.05-120sec at 600-1,600 deg.C and the fine powder obtained thereby is heat-treated for 0.5-5hr at 1,350-1,850 deg.C in the nonoxidizing atmosphere to obtain the composite fine powder of Si3N4 and SiC of <=1mu particle size. |
