| 摘要 |
PURPOSE:To prevent bubbling and flying of pure water drops at the time of distribution of the pure water, by setting and controlling of a discharge port position of a pure water nozzle at aforesaid time below the specified level of the pure water in a reaction cell. CONSTITUTION:A pure water nozzle 7 is installed to be available for vertical travels in the directions of Y inside a reaction cell 1. A driving means 8 for driving these travels serves to allow up and down motions of the nozzle 7 and it is controlled by a discharge port position controlling means 9. Namely, this means 9 controls the driving means 8 so that a position of the pure water discharge port 7a drops down below the specified water level position WL of the pure water in the reaction cell 1. By this construction, flying of pure water drops and bubbling on the occasion of branched-feeding of the pure water can be prevented. |
