APPARATUS FOR PRODUCING SILICON

摘要

PURPOSE:To remove efficiently pulverous powder silicon with simple constitution by capturing the pulverous powder silicon by-produced in a reaction chamber by a dust trap, introducing the same into an oxidizing means and subjecting the powder to a discharge treatment with a wet process dust collector. CONSTITUTION:A gaseous raw material contg. silicon is cracked in the reaction chamber 1 to deposit silicon on a substrate. The unreacted gaseous raw material and gaseous by-product remaining in the chamber 1 are introduced by an evacuation device 2 into the oxidizing means 3. The pulverous powder silicon by- produced in the chamber 1 is captured by the dust trap 10 provided in the mid-way of the discharge route and is conducted by a suction means consisting of a piping 13, a nozzle 12 and a blower 8 into the oxidizing means 3. The silicon is converted to an oxide by a combustion column in the means 3 and fed to the wet process dust collector 4 which shifts the oxide to an aq. phase. The aq. phase is then removed by a cyclone 6 and the vapor phase is released by the blower 8 via a bag filter 7.