| 摘要 |
PURPOSE:To stabilize an optical path by mounting a position control mechanism compensating the inclination of a mirror on the basis of the result of a computer computing the quantity of the inclination of the mirror compensated from the result of the detection of the positions of He-Ne for adjusting an optical axis. CONSTITUTION:An upward mirror 6 is mounted to a supporter 12 with screws 11 for adjusting positions, the screws 11 for adjusting positions consist of four, opposite two pair, a head-section gear 13 is engaged with the screws, and revolution transmission gears 14, 14' are intermeshed severally with a pair of the head-section gears at every one. A controller 18 for pulse motors 16, 16' is fitted separately, and connected by a signal cable 19. The controller 18 receives a mirror-inclination compensating command from a computer, the pulse motors 16, 16' are turned only by the necessary number of revolution in the direction of rotation required, the revolution is transmitted over the revolution transmission gears 14, 14' through bevel gears 15, 15', the head-section gear 13 is rotated, and the screws 11 for adjusting positions are turned, thus compensating the inclination of the mirror. Accordingly, laser beam pass through a predetermined optical path at all times, thus ensuring the stability of the optical path. |
