HIGHLY ACCURATE MACHINE TOOL

摘要

PURPOSE:To maintain the accuracy of machining tool for fragile material such as silicon by guiding a column and a ram through roll bearings between a saddle and a bed by means of hydraulic double-V groove and facing static air. CONSTITUTION:A saddle 30 is guided through double-V groove 11 and a hydraulic bearing 13 to move in perpendicular direction against the table 50. While a table 50 is guided through a static air bearing 33 to move in perpendicular direction against the saddle 30. A ram 80 will guide a column 60 through a pre- pressurized roll bearing. The spindle head 70 is exposed to the outside as much as possible and cooled forcefully. When constructing each guide structure in such a manner, high accuracy can be maintained.