| 摘要 |
PURPOSE:To prevent attachment of dust on wafers, by sucking the dust, which is yielded from a carrier and the like into a cleaning unit at the lower part of a cleaning tunnel, and discharging clean air from the upper part of the wafers. CONSTITUTION:A cleaning tunnel 11 is separated into the upper part and the lower part by a partitioning wall 17. A carrier 15 moves in the upper part of the tunnel 11. A truck 12 moves in the lower part of the tunnel 11. A cleaning unit 21 is provided at the adjacent part of the tunnel 11. Air is sent to the upper part from a fan 22 in the direction of an arrow and filtered by an air filter 23. The air is sent to the upper part of the tunnel 11 and inputted in the unit 21 through a slit 18 and the lower part of the tunnel 11. Thus the attachment of dust on wafers can be prevented. |
