发明名称 CRYSTAL DIAMETER CONTROL DEVICE FOR CRYSTAL GROWTH FURNACE
摘要 A crystal growing furnace has lift and rotation control apparatus for both a growing crystal and a crucible containing a melt. A transducer and a servo motor are disposed above the furnace having respective shafts connected along a common horizontal axis on opposite sides of a longitudinal light tube wherein the light tube and transducer shaft can be axially positioned by the shaft of the servo motor. The light tube has a lens for focusing at times on a spot on a meniscus in the furnace and at times on the melt, a light sense detector is connected to the light tube for at times generating a servo motor control error signal to drive the servo motor incrementally to an angular position corresponding to growth in the diameter of the meniscus by tracking a spot on the meniscus. The transducer generates an output signal indicative of incremental angular movement in response to growing the crystal for governing the lift and rotation control apparatus.
申请公布号 JPS61132586(A) 申请公布日期 1986.06.20
申请号 JP19850247896 申请日期 1985.11.05
申请人 GENERAL SIGNAL CORP 发明人 HENRII SHII RATOKA
分类号 C30B15/26 主分类号 C30B15/26
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