| 摘要 |
PURPOSE:To absorb and soften a distortion caused by a temperature variation, to deteriorate no output characteristic of a sensor, and also to reduce the cost of manufacture and parts by providing a cylindrical supporting base and an annular pedestal on a base, and suspending and fixing a sensor body to this pedestal. CONSTITUTION:A cylindrical supporting base 3 consisting of stainless steel is fixed by using an adhesive agent onto a base 11 of a case 1 of a semiconductor pressure sensor, and thereafter, an annular pedestal 4 consisting of silicon is fixed to the upper end face of the supporting base 3. Subsequently, a sensor body 2 which has formed a piezo-resistance element 2c consisting of P type silicon is fixed in a suspending state by sticking the upper face of a base part 2b to the pedestal 4. In this way, even if a fluid to be measured or an ambient temperature is varied and the base 11 is brought to thermal expansion, a distortion transmitted to the sensor body 2 through the pedestal 4 is absorbed and softened remarkably, and also it is not required to provide a compensating resistance. |
