发明名称 LOW FREQUENCY ACOUSTIC MICROSCOPE
摘要 The method of detecting near-surface flaws, inclusion or voids at plane (16) in a solid sample (13) by detecting acoustic energy specularly reflected and mode converted at the surface of the sample and reflected from flaws, inclusions or voids and forming an interference signal.
申请公布号 WO8603588(A1) 申请公布日期 1986.06.19
申请号 WO1985US02418 申请日期 1985.12.11
申请人 THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIO 发明人 KHURI-YAKUB, BUTRUS, THOMAS
分类号 G01N29/06;(IPC1-7):G01N29/04 主分类号 G01N29/06
代理机构 代理人
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