| 摘要 |
PURPOSE:To detect a defect of any complicated pattern at a high accuracy while enabling automatic recording and reproduction of the position and details thereof, by making a video camera to perform a video scanning over a chip in the same direction at a pitch integrally multiplying the chip size. CONSTITUTION:An X-Y stage 8 which is movable in the directions X and Y with a semiconductor wafer 3 securely carried thereon is so arranged that a video camera 5 is allowed to perform a video scanning over a chip being approached in the same direction and at a pitch integrally multiplying the chip size. A pattern image of the chip on the wafer 3 is taken with the video camera 5 through an optical system 13 having an autofocus mechanism and the video signal thereof is outputted into an image processing section 20 and memorized. In the image reproduction, pattern images at the same address of the two chips memorized are divided and continuously displaying on an image monitor 6 alternately. Then, an inspector visually judge the position of a chip with an abnormal pattern depending on the pattern images thus divided and displayed. When he find any abnormal point, the pattern image is halted and a required item is inputted from a keyboard to be memorized while being printed out with a printer 50. |
