| 摘要 |
PURPOSE:To obtain a vacuum valve which can prevent corrosion of a rod and confirm the opening and closing drive of the valve from the outside by covering the outer periphery of the rod with an expansible bellows member, and forming a part of a valve box by a transparent member. CONSTITUTION:In a vacuum valve where a valve element 16 adapted to open and close an inlet hole 13 by reciprocation of a rod 2 is disposed in the interior of a valve box 15 having the inlet hole 13 and an outlet hole 14, the outer periphery of the rod 21 is covered with an expansible bellows member 22, and a part of the valve box is formed by a transparent member 23.
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