| 摘要 |
PURPOSE:To easily bake a crucible and to hold it clean by sending crucibles from a crucible sending device to a heating pipe successively and baking them, sending the baked crucibles to a holding part, and admitting oxygen for purging into the holding part. CONSTITUTION:Plural crucibles are put in a cassette 13 and arranged at the feed opening of the heating pipe 2. The plunger 9 of the sending device 6 is push out to send a crucible C to the heating area 3 of the heating pipe 2, thereby baking it at about 1,000 deg.C. The crucible after being baked is taken out of the heating pipe 2 and moved to the holding part 16. Then, the oxygen for purging is admitted from an intake pipe 19 to prevent recontamination with external air, etc. Then, the crucible is taken out of an takeout opening 18 and another crucible is sent out of the sending device 6 when the takeout operation is detected. Thus, crucibles are sent successively to the heating pipe, baked, and purged with the oxygen after the baking, so crucibles which are cleaned to a high level are obtained without skillfulness. |
