Thermal head and producing process thereof

摘要

A thermal head composed of an electrically insulative substrate, a resistive film made of TiOx (0<x<2) formed on the substrate, and an electrode made of a metal such as Au, Al, and Cu etc. The resistive film is produced by an electron beam vapor deposition method employing an apparatus having a vacuum chamber wherein an evaporation source composed of Ti is irradiated with an electron beam to evaporate Ti so as to deposit a resultant TiOx on the substrate.