| 摘要 |
PURPOSE:To enable measurement of thickness distribution with high-precision and high-resolving capacity by simple operation, by allowing 2 pairs of measuring apparatuses set on both sides of a liquid film to displace parallel to a film plane and adding 2 pairs of values obtained by obseration of a displacement of bright spot from the reference point of a laser beam. CONSTITUTION:Movable measuring benches 6, 9 are driven by a threaded shaft 12 by a transversal displacement pulse motor 11 and 2 pairs of measuring apparatuses are displaced horizontally parallel to a liquid film 3 simultaneously. And, laser beams are emitted from emitters 4, 7 simultaneously and measuring apparatus output signals from sensors 5, 8 are introduced synchronizedly into a controlling and calculating unit and after addition, they are issued out as operation outputs. Following this procedures, the reference point is set in the middle of both measuring apparatuses and, the adding output is taken as a distance bright points and these values are made as those proportional to the liquid file thickness. By this arrangement, effects by uneven concentrations of the liquid film and foreign matters are reduced and an error caused by a moving liquid film is removed and distribution of the liquid film can be measured with high precision and high revolving capacity. |
