| 摘要 |
PURPOSE:To shorten the time required for exchanging raw materials so as to improve the productivity of an electron gun, by constituting the raw material of the evaporating source in a crucible at the electron gun section of a vacuum deposition device o plural pieces of blocks piled up one upon another and pushing out and removing used raw materials. CONSTITUTION:The raw material of the evaporating source for deposition in a crucible 6 at the electron gun section of a vacuum deposition device is constituted of plural blocks 41-45 and made movable in the vertical direction by means of a driving device 70. At the same time, a block removing device 9 which is able to move in the horizontal direction is provided. At the time of deposition, a thermion flow 2 from a filament 1 is bent by means of a magnet 3 and the surface of the uppermost block 14 is irradiated and deposited on the surface of an aimed substrate. When the surface of he uppermost block 41 has been evaporated and the block 41 becomes unusable, the block 41 is pushed upward by the driving device 70 and pushed out of the crucible by the block removing device 9. Then the new 2nd block 42 is pushed upward to a prescribed location and the depositing work is continued. Therefore, exchanging works of the raw material blocks are reduced and productivity is improved.
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