发明名称 THIN-FILM PHOTOELECTRIC CONVERSION ELEMENT AND MANUFACTURE THEREOF
摘要 PURPOSE:To obtain a thin-film photoelectric conversion element having the uniformity and stability of characteristics, high reliability and excellent productivity by forming a light-shielding layer with a lighting window onto a light- transmitting insulating substrate, shaping a layer preventing the diffusion of the light- shielding layer to the upper section of the light-shielding layer and laminating a light-transmitting insulating layer. CONSTITUTION:A layer 6 preventing the diffusion of a material for a light- shielding layer 21 can be shaped by a metallic oxide film and a nitride film in the light-shielding layer 21, thus resulting in simple constitution, the unnecessity of a complicate process and excellent productivity. Since a glass substrate 1 and a light-transmitting insulating layer 5 are made of the same substance in a lighting window 4, a difference between refractive indices is not generated on the boundary surface, thus reducing the loss of lighting beams by reflection, then largely improving the utilization of beams.
申请公布号 JPS61128562(A) 申请公布日期 1986.06.16
申请号 JP19840250029 申请日期 1984.11.27
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NISHIKURA TAKAHIRO;KOJIMA NORIKO;YOSHIGAMI NOBORU;WASA KIYOTAKA;IKEDA KOSUKE
分类号 H01L27/146;H01L27/14;H01L31/0216;H04N1/028 主分类号 H01L27/146
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