摘要 |
PURPOSE:To obtain a thin-film photoelectric conversion element having the uniformity and stability of characteristics, high reliability and excellent productivity by forming a light-shielding layer with a lighting window onto a light- transmitting insulating substrate, shaping a layer preventing the diffusion of the light- shielding layer to the upper section of the light-shielding layer and laminating a light-transmitting insulating layer. CONSTITUTION:A layer 6 preventing the diffusion of a material for a light- shielding layer 21 can be shaped by a metallic oxide film and a nitride film in the light-shielding layer 21, thus resulting in simple constitution, the unnecessity of a complicate process and excellent productivity. Since a glass substrate 1 and a light-transmitting insulating layer 5 are made of the same substance in a lighting window 4, a difference between refractive indices is not generated on the boundary surface, thus reducing the loss of lighting beams by reflection, then largely improving the utilization of beams. |