发明名称 RELIABILITY TESTING METHOD OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To accurately measure the amount of time the defects came to occur, by performing a testing through putting the semiconductor element in a testing chamber, with the element being connected to a recorder that records the progress of the current supplied to the semiconductor element together. CONSTITUTION:At first, plural semiconductor element 1 are mounted on an aging substrate 2, then, the substrate 2 is connected to a direct current power source 3 through a resistor 6 with a lead wire 4, and is put in a testing bath 5 that is a high-temperature thermostatic chamber while the specified voltage is applied to the semiconductor elements 1 together. After that, when the testing equipment including the semiconductor elements 1 is stabilized, the voltage drop at the resistor 6 is recorded after the both ends of the resistor 6 have been connected to the recorder 7. By doing this, it is made possible to measure the amount of time the defects came to occur.
申请公布号 JPS61128541(A) 申请公布日期 1986.06.16
申请号 JP19840251013 申请日期 1984.11.27
申请人 MITSUBISHI ELECTRIC CORP 发明人 KUROHICHI MINORU;SHINKAWA TANEKAZU;IWAMORI KIYOSHI
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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