| 摘要 |
PURPOSE:To enable extension of measuring range, reduction of size and weight of an apparatus, by bisecting the forward travelling direction of a specimen surface and, developing images and irradiating the integrated both surfaces by folding back individually onto an area sensor. CONSTITUTION:A reflected ray of light of a specimen surface 6 is irradiated onto a bench-type prism 7 to be bisected and one of the wove fronts is reflected twice by a right-angle prism 8 to be irradiated onto a bench-type prism 9 to reach an area sensor 12 through an image developing lens 11. The other wave front is reflected twice by a right-angle prism 10 to be transmitted through the prism 9 and reaches the sensor 12 through the lens 11 to be integrated with the other wave front. By this arrangement, interference fringes are produced on the sensor 12 by allowing the prism 7 to be displaced in the X direction by a driving means 14 and giving sideward displace ment to the wave front in the X direction and at the same time, the prism 8 is dis placed in the Z direction by a driving means 13 for a phase modulation. And, a shear ing intersecting with the X direction of the prism 7 through a right angle is performed by the Y direction displacement of a prism 10 by a driving means 15 and this kind of shearing in X, Y directions make measurement of a shape of curved of the speciment possible. |
