| 摘要 |
PURPOSE:To obtain a photoconductive member holding surface potential for a long period in the dark, vanishing rapidly the potential when light is irradiated, and applicable to an electrophotographic process by forming an amorphous carbon layer as at least one of blocking layers. CONSTITUTION:An amorphous carbon layer is formed as at least one of blocking layers. A photoconductive member is obtd. by successively forming a blocking layer 2, the photoconductive layer 3 of amorphous silicon hydride (a-Si;H) and an electrostatically chargeable surface layer 4 of amorphous silicon carbide (a-Si;C) on the electrically conductive substrate 1 of Al or the like. The blocking layer 2 is composed of an amorphous carbon (a-C) layer 2-1 and an a-Si;C layer 2-2. The layer 2-1d is formed by decomposing gas contg. carbon by glow discharge. The layer 2-2 is produced on the interface between the a-C layer 2-1 and the a-Si;H layer 3 when the layer 3 is formed on the layer 2-1. Both the layers 2-1, 2-2 shown superior characteristics as the blocking layer 2. |
