FORMATION OF PLATINUM GROUP OXIDE FILM

摘要

PURPOSE:To form a film consisting of the oxide of a platinum group metal on a substrate at a high film forming rate by introducing the gaseous fluoride of the platinum group metal and oxygen or oxygen compd. into a reaction chamber and decomposing these gases by electric discharge. CONSTITUTION:The inside of the reaction chamber 1 is evacuated by a vacuum device 10 and thereafter gaseous IrF6 is introduced through a supply pipe 8 and gaseous O2 through a supply pipe 9 at the ratio determined by the prescribed equil. conditions with IrOx. The substrate 7 imposed on a susceptor 6 contg. a heater 6a is maintained at about 100-300 deg.C. The IrF6 and O2 in the gaseous raw material are then decomposed to form IrOx by a plasma CVD method in which high-frequency electricity is impressed between electrode plates 3 and 5 disposed to face each other from a high-frequency power source 12, thus forming the IrOx film on the substrate 7. The quantity of oxygen is easily controlled by the above-mentioned method at the high film forming rate and the thick platinum group oxide film which can be utilized as a transparent electrode for a solar battery is obtd. with the inexpensive installation.