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发明名称
POSITIVES RESISTMATERIAL.
摘要
申请公布号
AT20395(T)
申请公布日期
1986.06.15
申请号
AT19830101822T
申请日期
1983.02.24
申请人
MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E.V.
发明人
ASMUSSEN, FRITHJOF, DR.;SOTOBAYASHI, HIDETO, PROF., DR.;CHEN, DR. JIANG-TSUN;SCHNABEL, WOLFRAM, PROF. DR.
分类号
C08F220/22;G03F7/26;(IPC1-7):G03F7/26
主分类号
C08F220/22
代理机构
代理人
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