| 摘要 |
<p>PURPOSE:To obtain helium having purity with high rate of recovery and inexpensive cost without using a cryogenic solvent by purifying crude He using a gas separating membrane device and a pressure swing adsorption device in combination. CONSTITUTION:Crude gas 1 contg. He is compressed by a compressor 8a, introduced into a pretreating adsorption tower 10a where the moisture and CO2, etc. contained in the crude gas 1 are removed. Then, the pretreated cruded gas is introduced into a purifying zone (b) provided with a gas separation membrane and separated into permeable He and impermeable impurities 7; the impurities 7 are discharged out of the system. The crude gas having permeated the separating membrane 11 is compressed by a compressor 8b, and introduced into an adsorption tower 12a for purifying He in a pressure swing adsorption zone (c). Impurities remaining in the crude gas is adsorbed to active carbon, etc.; purified He is stored in a tank 13.</p> |
