| 摘要 |
PURPOSE:To obtain an output of 10V or more by a change in the voltage of the titled element due to pressure to be applied to the element by a method wherein the diffusion layer is constituted of 5 layers of the two outermost layers and the mutually adjacent three layers, the conductive type of each of which is different, the mutually adjacent three layers are disposed at the central part of the diffusion layer, having the thinner thickness as compared to the periphery of the diffusion layer, and the terminal electrodes, which come into contact with the base adjacent to the electrodes along with the emitter layers adjacent to the both outermost layers and the control electrode to connect to the base layer, which is one of the mutually adjacent three layers existing at the central part of the diffusion layer and is adjacent to the outermost layers, are provided. CONSTITUTION:The center-part of a P type punch-through diffusion layer 2 is made thinner to form a pressure sensing part 3 and P type base layers 4 and 5 are formed by diffusion an impurity from both faces of the center-part. N type emitter layers 6 and 7 are formed in the layers 4 and 2. Terminal electrodes 8 and 9, which come into contact with both emitter layers 6 and 7 and the base adjacent to the electrodes, and a control electrode 10 to connect to the base layer 4 are provided and a protective film 11 is formed on the face of the base other than parts of the face, whereon the electrodes 8, 9 and 10 are provided. Inverse voltage of 10V is always impressed on a junction 20 between the electrodes 8 and 9 by a power source 12. When pressure 30 is applied to the pressure sensing part 3, the interterminal voltage of this SSS varies into a voltage of about 10V when the pressure exceeds a certain threshold value. The SSS detects this fluctuation and can be used as a pressure sensing switch. |
