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发明名称
摘要
申请公布号	JPS6192044(U)	申请公布日期	1986.06.14
申请号	JP19840177497U	申请日期	1984.11.21
申请人		发明人
分类号	B65H5/02;H01L21/02;H01L21/324;H01L21/677;H01L21/68;(IPC1-7):H01L21/02	主分类号	B65H5/02
代理机构		代理人
主权项
地址

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