| 摘要 |
PURPOSE:To avoid the damage of a material to be measured by a method wherein a proper clearance is formed between a pusher and a clamper and the material to be measured is held under the state of floating, introduced into a positioning jig and positioned at the position of measurement. CONSTITUTION:A pair of projecting sections 14, height thereof is made larger than the thickness of a semiconductor device 13 only by a fixed quantity, are formed at positions where the falling of the device 13 is not disturbed at the opposite corner sections of a clamper 9. A pair of receiving sections 15 are shaped where corresponding to a pair of the projecting sections 14 of a pusher 8. Consequently, a clearance in proper size is formed between the pusher 8 and the clamper 9, thus preventing the tilting of the device 13 and the pushing and constraining of the device 13 by the pusher 8 and the clamper 9. Accordingly, the damage of the device 13 is avoided. |
