WAFER TRANSPORT SYSTEM

摘要

In a semiconductor wafer transport system, a wafer is introduced into a vacuum evacuation chamber (12, 13) or delivered therefrom via introduction and delivery ports (35). To improve the quality of the wafers, an evacuation aperture (33) is provided near the introduction port or delivery port, so that foreign particles adhering on the wafer or existing in the evacuation chamber can be removed by vacuum evacuation.