| 摘要 |
PURPOSE:To obtain an inspection result of high reliability by renewing successively a threshold for a pattern identifying standard according to an input signal in a part close to a pattern measuring portion. CONSTITUTION:A pair of picture input sensors 1 and 2 placed in parallel with an arrangement direction of a semiconductor element 12 in a predetermined space are scanned on a wafer 13 in winding in a predetermined pitch. When the picture input sensor 1 is scanned in a comparatively right direction from a position Xi to a wafer 13, and is moved from a position Xi+1 through Xi+2 to Xi+3, a picture signal input into the picture input sensor 1 in the position Xi is sent to a comparison portion 8 and is also laid out and maintained in a memory I by an address counter 9 between Xi and Xi+1. A threshold is calculated by a threshold operating portion 10 between Xi+1 and Xi+2. After a picture signal input in the position Xi between Xi+2 and Xi+3 is calculated just before, that is to say, between Xi+1 and Xi+2, and is compared with a threshold maintained in a threshold memory 11, a pattern and a background is discriminated through becoming a binary number. |
