| 摘要 |
PURPOSE:To perform pattern forming treatment without damaging the surface of a printed circuit board by providing a cell between treating liquid tanks which have been placed adjacently, and jetting a liquid or a gas different from a treating liquid of the adjacent tank, into the cell. CONSTITUTION:In a resist developing device 1 of a printed circuit board, a charging part 2, the first developing tank 3, the second developing tank 4, the third developing tank 5, a washing tank 6, and a carrying-out part 7 are placed adjacently in order. A cell is provided between each treating tank 3-6. A spray nozzle 10 is provided on the cell between the third developing tank 5 and the washing tank 6,and a liquid or a gas different from a treating liquid in both the tanks 5, 6 is jetted, and blown onto the board. By this mechanism, both the tanks 5, 6 are cut off completely, and no developer nor water is carried in onto the board which is passing. Accordingly, damage of the surface of the printed board and readhesion of the resist, etc., are not generated, and treatment such as good development and other pattern formation, etc., can be performed. |
