| 摘要 |
PURPOSE:To prevent collision among cargos and prevent noise and damage by inclining a cargo holder vertically when retreated into a lifting bed and horizontally when protruded in a multiple parallel storage device of plate-like materials such as wafers. CONSTITUTION:An arm 50 is swayed back and forth by the rotation of a motor 51, thereby a movable bed 56 is moved back and forth via a groove rail 57, a cargo holder 44 is advanced/retreated in a cargo storage section 48, and hooking members 67, 70 are engaged/disengaged by a cylinder device 66 to hold or release a case 69. With this holder 44 protruded into the storage section 48, the rear end of a sway plate 61 is pulled downward by a spring 72 to a horizontal position, and cargos can be delivered. At a retreat position, the cam face 75 rides on a cam roller 76, the holder 44 is inclined downward, wafers 45 are supported by the floor face of a case 69 and an inclined lower side plate, and collision among cargos under conveyance is prevented. Accordingly, the damage and noise of cargos is prevented. |
